| 1. | Silicon sensors are the tendency of the development of sensors . with the development of technology , mems ( micro - electro - mechanical systems ) have became more and more attractive 微硅传感器是传感器的发展趋势,随着技术的发展,将微硅传感器和测试电路集成在一块芯片上构成mems (微机电系统)更是受到了广泛的关注。 |